Source with Arc-Suppression Running @ > 5 millitorr in O2
A source with the Arc-Suppression option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.
Arc-Suppression is available as an optional feature for most Telemark production sources. It has a footprint similar to standard sources, but with the high voltage feedthroughs incorporated into the source. Two separate cooling water lines are required to cool the source body and the high voltage assembly.