Multi-Pocket Sources
From 6kW to 15kW with crucible
Capacity to 6x100cc
Single Pocket Sources
From 6kW to 20kW including
new 160cc Model 259
UHV Sources
Linear multi-pocket and single pocket UHV sources, as well as rotatable “near UHV” sources, which can be pumped into the -10 torr range and operated in the -9 torr range.