Ion Sources

Telemark Model 750 Ion Source
Model 750 Ion Source
Telemark Model 1250 Ion Source
Model 1250 Ion Source
Telemark Model 2000/3000 Ion Source
Model 2000/3000 Ion Source

The Gridless End-Hall Ion Sources have been specially developed to provide a cost effective solution for ion assisted vacuum processes from small to large sized deposition systems. The sources provide an extremely reliable and maintenance-free up to 3kW source for many applications in PVD processes.
The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.

Brochure, Ion Beam Sources 

Manual, Ion Beam Sources 

Drawings, Ion Beam Sources 

Features

Ion Source V Power Supply
Ion Source V Power Supply
  • Ion beam energies up to 300eV
  • Ion beam currents to 15 amps
  • Full-time use of high purity oxygen, argon or nitrogen.
  • Highly efficient design greatly reduces gas load
  • Water-cooled to reduce maintenance and radiation load
  • Extremely low maintenance. The patented design utilizes a specially coated anode, which resists build-up of electrically insulating oxide coatings. No routinely replacement parts.
  • Extremely stable operation in IAD processes
  • Broad – beam divergence for large area coverage with uniform ion flux.
  • Pulse-mode operation for ion-assistance of radiation-sensitive film materials such as many commonly used infrared and UV thin film materials eg MgF2 & LaF2. For further information please refer to separate information sheets.
  • Remote Control and Monitoring – all control through an RS232 interface

Specs

Model 750Model 1250Model 2000Model 3000
Source Diameter63mm diameter by 64mm long (2.48” x 2.53”)74mm diameter by 61mm long (2.91” x 2.4”)114mm diameter by 93mm long (4.49” x 3.66”)114mm diameter by 93mm long (4.49” x 3.66”)
Source Weight1.4 kgs (approx. 3 lbs)1.4 kgs (approx. 3 lbs)4 kg (approx. 8.5 lbs)4 kg (approx. 8.5 lbs)
Beam PowerAnode volts selectable to 225 volts; anode power 750WAnode volts selectable to 225 volts; anode power 1250WAnode volts selectable to 300 volts; anode power 2000WAnode volts selectable to 300 volts; anode power 3000W
Anode CurrentMaximum 5 amps under manual or automatic beam controlMaximum 5 amps under manual or automatic beam controlMaximum 7 amps under manual or automatic beam controlMaximum 10 amps under manual or automatic beam control
Beam DivergenceWide beam divergence in excess of 80 degreesWide beam divergence in excess of 80 degreesWide beam divergence in excess of 80 degreesWide beam divergence in excess of 80 degrees
Gas FlowApproximately 7sccm argon required to produce 2 amps (typical)Approximately 7sccm argon required to produce 2 amps (typical)Approximately 8sccm argon required to produce 2 amps (typical)Approximately 8sccm argon required to produce 2 amps (typical)
Cooling WaterMinimum 2.3 liters/minute. Water flow is constantly monitoredMinimum 2.3 liters/minute. Water flow is constantly monitoredMinimum 2.5 liters/minute. Water flow is constantly monitoredMinimum 4.5 liters/minute. Water flow is constantly monitored
Power Unit Dimensions135mm x 480mm x 406mm135mm x 480mm x 406mm135mm x 480mm x 406mm180mm x 525mm x 435mm
Power Unit Weight28 kgs (60lbs)28 kgs (60lbs)30 kgs (66lbs)30 kgs (66lbs)

Options

Optional Features Available –

  • Dual Filament. Electronic system detects filament failure and auto switches to second filament.
  • Dual Gas This feature provides use of either pure gas delivery or a mixture of two gases in any ratio.