3kW ST3000 Ion Beam Source

The ST3000 Gridless End-Hall Ion Source has been specially developed to provide a cost effective solution for ion assisted vacuum processes for medium to large sized deposition systems. The ST3000 provides an extremely reliable and maintenance-free 3kW sourcefor many applications in PVD processes.
The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.

  • Ion beam energies up to 300eV
  • Ion beam currents to 15 amps
  • Full-time use of high purity oxygen, argon or nitrogen.
  • Highly efficient design greatly reduces gas load
  • Water-cooled to reduce maintenance and radiation load
  • Extremely low maintenance. The patented design utilizes a specially coated anode, which resists build-up of electrically insulating oxide coatings. No routinely replacement parts.
  • Extremely stable operation in IAD processes
  • Broad – beam divergence for large area coverage with uniform ion flux.
  • Pulse-mode operation for ion-assistance of radiation-sensitive film materials such as many commonly used infrared and UV thin film materials eg MgF2 & LaF2. For further information please refer to separate information sheets.
  • Remote Control and Monitoring – all control through an RS232 interface
Ion Source System Series III ST3000
Source Dimensions115 mm diameter by 80 mm long (4.52” x 3.15”)
Source Weight4 kg (approx. 8.5 lbs)
Beam PowerAnode volts selectable to 300 volts; anode power 3000 W
Anode CurrentMaximum 10 amps under manual or automatic beam control
Beam DivergenceWide beam divergence in excess of 80 degrees
Gas FlowApproximately 8sccm argon required to produce 2 amps (typical)
Cooling WaterMinimum 4.5 liters/minute. Water flow is constantly monitored
Power Unit Dimensions180mm x 525mm x 435mm
Power Unit Weight30 kgs (66lbs)

Optional Features Available –

  • Dual Filament. Electronic system detects filament failure and auto switches to second filament.
  • Dual Gas This feature provides use of either pure gas delivery or a mixture of two gases in any ratio.