Ultra Compact UHV Sources

Model 509 UHV Ebeam Source
Model 509 UHV Ebeam Source

The model 509 is a 4cc UHV source with a 270° emitter. It can be installed on a 6 inch CF flange in a vertical orientation for installations where effusion (Knudsen cell) K-cells are being used. The 509 source is perfect for refractory metals and high melting point materials in MBE environments.

  • Mounted on 6” CFF for direct replacement of K-cells
  • No beam sweep
  • 4cc pocket
  • 5kV max.
  • Shutter or Dual HV feedthru can be mounted on 6” CFF
Model 509
E-Beam Deflection270°
Power Rating4 kW
High Voltage Range-5 kV to -7 kV
Filament PowerUp to 575mA at 7kV
Water Requirements2 gpm(min.)@ 60°F
Crucible Volume4cc
Bake Out Temperature250°C
Model 509
4cc509-04-1
4cc with VCR Fittings509-04-2
4cc on 6 inch CF Flange509-07
4cc on 6 inch CF Flange With HV feedthru509-08