High Capacity Multi-Pocket Sources

For applications requiring large evaporation materials inventory (e.g. multiple or thick layers, extended throw distances) the Model 295 Source provides a wide range of crucible sizes including 6x 100cc, 16x 15cc, 10x 40cc, and a 1486cc trough. The Model 298 electron beam sources has crucible pocket sizes up to 16x 100cc and a trough of 2880cc. Available in 10Kw or 15Kw versions, with Arc-Suppression available as an option.

Please contact Telemark with your ebeam source requirements for model and configuration assistance.

  • 270° beam deflection (Hidden Filament)
  • Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
  • Rugged, reliable construction
  • Designed for ease of use and maintainability
  • Permanent magnet for primary beam positioning to provide improved control of evaporation process
  • Durable emitter assembly with unique design for increased filament life and simple maintenance
  • Plug-in emitter assembly for easy filament replacement
  • Side or bottom crucible rotation drive
  • Most components are maintained in stock
  • A Source can normally be delivered in one-two weeks ARO

Improved Source Magnetics Reduce Beam Curl

Telemark Improved Source Magnetics
Telemark Improved Source Magnetics

A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.

Model 285Model 287Model 295Model 298
E-Beam Deflection270°270°270°270°
Power Rating10 kW10 kW10 kW* / 15 kW*10 kW* / 15 kW*
High Voltage Range-6 kV to -10 kV-6 kV to -10 kV-6 kV to -10 kV-6 kV to -10 kV
Lateral Coil Resistance3.0 ohms3.0 ohms3.0 ohms3.0 ohms
Long. Coil Resistance9.6 ohms9.6 ohms9.6 ohms9.6 ohms
Water Requirements3 gpm(min.)@ 60°F5 gpm(min.)@ 60°F5 gpm(min.)@ 60°F5 gpm(min.)@ 60°F

*Nominal value; actual power rating may vary, depending on customer’s process.

Model 285Model 287Model 295Model 298
6 x 100cc (10kW*)295-51/295-52
6 x 100cc (15kW*)295-01/295-02
9 x 60cc287-81/287-82
10 x 40cc (10kW*)287-87/287-88295-71/295-72
14 x 15cc285-85/285-86
12 x 25cc Shallow285-83/285-84
15 x 15cc287-21/287-22
Trough, 1486cc(10kW*)295-91/295-92
Trough, 512cc285-87/285-88
12 x 100cc (15kW*)298-77
16 x 100cc (10kW*)298-75
Trough, 2880cc(10kW*)298-91
Telemark Crucible Types
Crucible Types


Arc Free Upgrade

Telemark Arc-Suppression

A source with the Arc Free (Suppression) option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.


Self-Sealing Cover Upgrade

Self Sealing E-Beam Cover

An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.

Telemark Feedthroughs

Telemark HV Feedthrough Cover
HV Feedthrough Cover

Telemark Crucible Indexer Controller
Crucible Indexer Controller

Telemark Water Flow Switch
Water Flow Switch

Telemark E-Beam Shutter
E-Beam Shutter

Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.