High Capacity Multi-Pocket Sources
For applications requiring large evaporation materials inventory (e.g. multiple or thick layers, extended throw distances) the Model 295 Source provides a wide range of crucible sizes including 6x 100cc, 16x 15cc, 10x 40cc, and a 1486cc trough. The Model 298 electron beam sources has crucible pocket sizes up to 16x 100cc and a trough of 2880cc. Available in 10Kw or 15Kw versions, with Arc-Suppression available as an option.
Please contact Telemark with your ebeam source requirements for model and configuration assistance.
- ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
- 270° beam deflection (Hidden Filament)
- Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
- Rugged, reliable construction
- Designed for ease of use and maintainability
- Permanent magnet for primary beam positioning to provide improved control of evaporation process
- Durable emitter assembly with unique design for increased filament life and simple maintenance
- Plug-in emitter assembly for easy filament replacement
- Side or bottom crucible rotation drive
- Most components are maintained in stock
- A Source can normally be delivered in one-two weeks ARO
Improved Source Magnetics Reduce Beam Curl
A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.
| Model 285 | Model 287 | Model 295 | Model 298 | |
|---|---|---|---|---|
| E-Beam Deflection | 270° | 270° | 270° | 270° |
| Power Rating | 10 kW | 10 kW | 10 kW* / 15 kW* | 10 kW* / 15 kW* |
| High Voltage Range | -6 kV to -10 kV | -6 kV to -10 kV | -6 kV to -10 kV | -6 kV to -10 kV |
| Lateral Coil Resistance | 3.0 ohms | 3.0 ohms | 3.0 ohms | 3.0 ohms |
| Long. Coil Resistance | 9.6 ohms | 9.6 ohms | 9.6 ohms | 9.6 ohms |
| Water Requirements | 3 gpm(min.)@ 60°F | 5 gpm(min.)@ 60°F | 5 gpm(min.)@ 60°F | 5 gpm(min.)@ 60°F |
*Nominal value; actual power rating may vary, depending on customer’s process.
| Model 285 | Model 287 | Model 295 | Model 298 | |
|---|---|---|---|---|
| 6 x 100cc (10kW*) | 295-51/295-52 | |||
| 6 x 100cc (15kW*) | 295-01/295-02 | |||
| 9 x 60cc | 287-81/287-82 | |||
| 10 x 40cc (10kW*) | 287-87/287-88 | 295-71/295-72 | ||
| 14 x 15cc | 285-85/285-86 | |||
| 12 x 25cc Shallow | 285-83/285-84 | |||
| 15 x 15cc | 287-21/287-22 | |||
| Trough, 1486cc(10kW*) | 295-91/295-92 | |||
| Trough, 512cc | 285-87/285-88 | |||
| 12 x 100cc (15kW*) | 298-77 | |||
| 16 x 100cc (10kW*) | 298-75 | |||
| Trough, 2880cc(10kW*) | 298-91 | |||
| Side/Bottom | Side/Bottom | Side/Bottom | Side |
Arc Free Upgrade
A source with the Arc Free (Suppression) option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.
Self-Sealing Cover Upgrade
An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.
Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.