Telemark Model 295 E-Beam Source
Model 295 E-Beam Source
Telemark Model 298 E-Beam Source
Model 298 E-Beam Source
Telemark Model 285 E-beam Source
Model 285 E-Beam Source

Brochure

E-Beam Sources 

Manual

Model 295 E-beam Source 

Drawings

Model 285 E-beam Source 
Model 287 E-beam Source 
Model 295 E-beam Source 
Model 298 E-beam Source 
Contact Telemark for 3D models

Shop Online for Spare Parts

For applications requiring large evaporation materials inventory (e.g. multiple or thick layers, extended throw distances) the Model 295 Source provides a wide range of crucible sizes including 6x 100cc, 16x 15cc, 10x 40cc, and a 1486cc trough. The Model 298 electron beam sources has crucible pocket sizes up to 16x 100cc and a trough of 2880cc. Available in 10Kw or 15Kw versions, with Arc-Suppression available as an option.

Please contact Telemark with your ebeam source requirements for model and configuration assistance.

Features

  • ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
  • 270° beam deflection (Hidden Filament)
  • Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
  • Rugged, reliable construction
  • Designed for ease of use and maintainability
  • Permanent magnet for primary beam positioning to provide improved control of evaporation process
  • Durable emitter assembly with unique design for increased filament life and simple maintenance
  • Plug-in emitter assembly for easy filament replacement
  • Side or bottom crucible rotation drive
  • Most components are maintained in stock
  • A Source can normally be delivered in one-two weeks ARO

Improved Source Magnetics Reduce Beam Curl

Telemark Improved Source Magnetics

Telemark Improved Source Magnetics

A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.

Specs

Source 285 Source 287 Source 295 Source 298
E-Beam Deflection270°270°270°270°
Power Rating10 kW10 kW10 kW* / 15 kW*10 kW* / 15 kW*
High Voltage Range-6 kV to -10 kV-6 kV to -10 kV-6 kV to -10 kV-6 kV to -10 kV
Lateral Coil Resistance3.0 ohms3.0 ohms3.0 ohms3.0 ohms
Long. Coil Resistance9.6 ohms9.6 ohms9.6 ohms9.6 ohms
Water Requirements3 gpm(min.)@ 60°F5 gpm(min.)@ 60°F5 gpm(min.)@ 60°F5 gpm(min.)@ 60°F

*Nominal value; actual power rating may vary, depending on customer’s process.

Models

Side/Bottom 285 Side/Bottom 287 Side/Bottom 295 Side 298
6 x 100cc (10kW*)295-51/295-52
6 x 100cc (15kW*)295-01/295-02
9 x 60cc287-81/287-82
10 x 40cc (10kW*)287-87/287-88295-71/295-72
14 x 15cc285-85/285-86
12 x 25cc Shallow285-83/285-84
15 x 15cc287-21/287-22
Trough, 1486cc(10kW*)295-91/295-92
Trough, 1512cc285-87/285-88
12 x 100cc (15kW*)298-77
16 x 100cc (10kW*)298-75
Trough, 2880cc(10kW*)298-91

Telemark Crucible Types

Crucible Types

Options

Arc Free Upgrade

Telemark Arc-Suppression

A source with the Arc Free (Suppression) option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.

 

Self-Sealing Cover Upgrade

Self Sealing E-Beam Cover

An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.

Accessories

Telemark Feedthroughs

Feedthroughs


Telemark HV Feedthrough Cover

HV Feedthrough Cover


Telemark Crucible Indexer Controller

Crucible Indexer Controller


Telemark Water Flow Switch

Water Flow Switch


Telemark E-Beam Shutter

E-Beam Shutter

Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.