High Capacity Multi-Pocket E-Beam Sources

Telemark Model 295 E-Beam Source — Model 295 E-Beam Source

Telemark Model 298 E-Beam Source — Model 298 E-Beam Source

Telemark Model 285 E-beam Source — Model 285 E-Beam Source

Brochure

Manual

Drawings

Model 285 E-beam Source
Model 287 E-beam Source
Model 295 E-beam Source
Model 298 E-beam Source
Contact Telemark for 3D models

Shop Online for Spare Parts

For applications requiring large evaporation materials inventory (e.g. multiple or thick layers, extended throw distances) the Model 295 Source provides a wide range of crucible sizes including 6x 100cc, 16x 15cc, 10x 40cc, and a 1486cc trough. The Model 298 electron beam sources has crucible pocket sizes up to 16x 100cc and a trough of 2880cc. Available in 10Kw or 15Kw versions, with Arc-Suppression available as an option.

Please contact Telemark with your ebeam source requirements for model and configuration assistance.

Features

ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
270° beam deflection (Hidden Filament)
Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
Rugged, reliable construction
Designed for ease of use and maintainability
Permanent magnet for primary beam positioning to provide improved control of evaporation process
Durable emitter assembly with unique design for increased filament life and simple maintenance
Plug-in emitter assembly for easy filament replacement
Side or bottom crucible rotation drive
Most components are maintained in stock
A Source can normally be delivered in one-two weeks ARO

Improved Source Magnetics Reduce Beam Curl

Telemark Improved Source Magnetics

A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.

Specs


	Source 285	Source 287	Source 295	Source 298
E-Beam Deflection	270°	270°	270°	270°
Power Rating	10 kW	10 kW	10 kW* / 15 kW*	10 kW* / 15 kW*
High Voltage Range	-6 kV to -10 kV	-6 kV to -10 kV	-6 kV to -10 kV	-6 kV to -10 kV
Lateral Coil Resistance	3.0 ohms	3.0 ohms	3.0 ohms	3.0 ohms
Long. Coil Resistance	9.6 ohms	9.6 ohms	9.6 ohms	9.6 ohms
Water Requirements	3 gpm(min.)@ 60°F	5 gpm(min.)@ 60°F	5 gpm(min.)@ 60°F	5 gpm(min.)@ 60°F

*Nominal value; actual power rating may vary, depending on customer’s process.

Models


	Side/Bottom 285	Side/Bottom 287	Side/Bottom 295	Side 298
6 x 100cc (10kW*)			295-51/295-52
6 x 100cc (15kW*)			295-01/295-02
9 x 60cc		287-81/287-82
10 x 40cc (10kW*)		287-87/287-88	295-71/295-72
14 x 15cc	285-85/285-86
12 x 25cc Shallow	285-83/285-84
15 x 15cc		287-21/287-22
Trough, 1486cc(10kW*)			295-91/295-92
Trough, 1512cc	285-87/285-88
12 x 100cc (15kW*)				298-77
16 x 100cc (10kW*)				298-75
Trough, 2880cc(10kW*)				298-91

Crucible Types

Options

Arc Suppression Upgrade

A source with the Arc-Suppression option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.