Telemark Model 295 E-Beam Source
Model 295 E-Beam Source
Telemark Model 298 E-Beam Source
Model 298 E-Beam Source

For applications requiring large evaporation materials inventory (e.g. multiple or thick layers, extended throw distances) the Model 295 Source provides a wide range of crucible sizes including 6x 100cc, 16x 15cc, 10x 40cc, and a 1486cc trough. The Model 298 electron beam sources has crucible pocket sizes up to 16x 100cc and a trough of 2880cc. Available in 10Kw or 15Kw versions, with Arc-Suppression available as an option.

Please contact Telemark with your ebeam source requirements for model and configuration assistance.

  • ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
  • 270° beam deflection (Hidden Filament)
  • Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
  • Rugged, reliable construction
  • Designed for ease of use and maintainability
  • Permanent magnet for primary beam positioning to provide improved control of evaporation process
  • Durable emitter assembly with unique design for increased filament life and simple maintenance
  • Plug-in emitter assembly for easy filament replacement
  • Side or bottom crucible rotation drive
  • Most components are maintained in stock
  • A Source can normally be delivered in one-two weeks ARO

Improved Source Magnetics Reduce Beam Curl

Telemark Improved Source Magnetics

Telemark Improved Source Magnetics

A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.

Source 295 Source 298
E-Beam Deflection270°270°
Power Rating10 kW* / 15 kW*10 kW* / 15 kW*
High Voltage Range-6 kV to -10 kV-6 kV to -10 kV
Lateral Coil Resistance3.0 ohms3.0 ohms
Long. Coil Resistance9.6 ohms9.6 ohms
Water Requirements5 gpm(min.)@ 60°F5 gpm(min.)@ 60°F

*Nominal value; actual power rating may vary, depending on customer’s process.

Side/Bottom 295 Side 298
6 x 100cc (10kW*)-51 / -52
6 x 100cc (15kW*)-01 / -02
10 x 40cc (10kW*)-71 / -72
16 x 25cc (10kW*)-73 / -74
20 x 15cc (10kW*)-21 / -22
12 x 100cc (15kW*)-77
16 x 100cc (10kW*)-75
Trough, 1486cc(10kW*)-91 / -92
Trough, 2880cc(10kW*)-91

Telemark Crucible Types

Crucible Types

Arc Suppression Upgrade

Telemark Arc-Suppression

A source with the Arc-Suppression option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.

 

Self-Sealing Cover Upgrade

Self Sealing E-Beam Cover

An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.

Telemark Feedthroughs

Feedthroughs


Telemark HV Feedthrough Cover

HV Feedthrough Cover


Telemark Crucible Indexer Controller

Crucible Indexer Controller


Telemark Water Flow Switch

Water Flow Switch


Telemark E-Beam Shutter

E-Beam Shutter

Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.