Near UHV Multi-Pocket Sources

Telemark Model 266 E-Beam Source

Telemark near UHV (10-9 torr) ebeam sources (e-gun) are supplied with magnetic fluid feedthrough rotation assemblies. Telemark sources utilize 270⁰ beam deflection. Installation kits, source shutters and pocket indexers can be supplied. Please contact Telemark for your near UHV source needs.

  • 270° beam deflection (Hidden Filament)
  • Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
  • Rugged, reliable construction
  • Designed for ease of use and maintainability
  • Permanent magnet for primary beam positioning to provide improved control of evaporation process
  • Durable emitter assembly with unique design for increased filament life and simple maintenance
  • Plug-in emitter assembly for easy filament replacement
  • Side or bottom crucible rotation drive
  • Most components are maintained in stock
  • A Source can normally be delivered in one-two weeks ARO

Improved Source Magnetics Reduce Beam Curl

A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.

Model 249Model 269/279/299
E-Beam Deflection270°270°
Power Rating6 kW*10 kW*
High Voltage Range-6 kV to -10 kV-6 kV to -10 kV
Lateral Coil Resistance8.5 ohms3.0 ohms
Long. Coil Resistance7.5 ohms9.6 ohms
Water Requirements2 gpm(min.)@ 60°F3 gpm(min.)@ 60°F

*Nominal value; actual power rating may vary, depending on customer’s process.

Model 249Model 269Model 279Model 299
4 x 4cc249-64
4 x 7cc249-28269-28279-28
4 x 15cc269-02279-02
4 x 25cc269-08279-08
4 x 30cc269-20279-20
4 x 40cc w/web279-62299-45
4 x 40cc w/o web279-46
4x 60cc299-82
2x15cc / 2×25279-38
6 x 4cc249-66
6 x 7cc249-06269-06279-06
6 x 15cc269-12279-12
6 x 25cc279-18299-18
6x 30cc299-76
6x 40cc299-70
8 x 7cc269-14279-14
8x 15cc299-02
8x 25cc299-08
12x 7cc299-06

Telemark Crucible Types

Arc Suppression Upgrade

Telemark Arc-Suppression

A source with the Arc-Suppression option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.

Self-Sealing Cover Upgrade

Self Sealing E-Beam Cover

An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.

Telemark Feedthroughs

Telemark HV Feedthrough Cover
HV Feedthrough Cover

Telemark Crucible Indexer Controller
Crucible Indexer Controller

Telemark Water Flow Switch
Water Flow Switch

Telemark E-Beam Shutter
E-Beam Shutter

Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.