Quartz Crystal Sensor Heads
Telemark supplies robust single or dual quartz crystal (QCM) sensor heads. The dual crystal head includes a “shutter” for alternate use of crystals or the availability of a fresh crystal in the event of crystal failures. Telemark sensors come in a wide variety of options and can be supplied in a “bakeable” configuration for depositions in the 250⁰C range. Installation kits and custom designs are offered to our users.
Telemark can supply the finest quartz crystals and are available in Gold or Alloy with frequencies of 6 MHz and 5 MHz.
| Non-Bakeable Sensor | Bakeable Sensor | |
|---|---|---|
| Max Operating Temp | 105C | 200C |
| Max Bakeout Temp | 105C | 300C |
| Shutter Actuator | 80-100 PSI Air | 80-100 PSI Air |
| Water Flow | ||
| Optional Sputter Cap |  | |