The widest selection of electron beam sources comes from Telemark. We have invested significant effort to ensure the best beam geometry and performance of our sources. Small research sources and large production sources contain the very best in magnetic design and build quality. The strict attention to magnetic design improves material usage and ensures high film repeatability.

270⁰ beam deflection design is used on all Telemark sources and is state-of-the-art in ebeam technology. This ensures long filament life and longer run times before servicing.

Telemark also offers complete ebeam sources mounted on to flanges for easy installation and servicing.

Our Engineers are happy to discuss the best options for your application and mounting needs.

E-Beam Sources


Multi-pocket sources for layer stacks are essential to the thin film market. Telemark provides pocket sizes from 4cc to 100cc. We use high quality seals and sealing surfaces to ensure smooth hearth movement and exact pocket indexing.
Telemark single pocket e-beam sources to 160cc.

E-Beam Sources

Single Pocket

For single material depositions Telemark has a wide selection of hearth sizes from 1.5cc to 160cc. Most Telemark single pocket sources have a removable crucible for easy servicing.

E-Beam Sources


For customers wishing to supply the crucible as part of their mechanical assembly, the crucible-less sources offers a compact, cost-effective solution.

E-Beam Sources

Flange Mounted

Telemark sources can be supplied in side or bottom flange mounting for easy installation. Please contact Telemark for your source flange mounting needs.

E-Beam Source

Accessories and Upgrades

Crucible Indexers, Shutter, Feedtroughs, Arc Suppression Upgrade and Self Sealing Cover Upgrade