Production Multi-Pocket Sources
Telemark offers the largest selection of multi-pocket electron beam sources on the market. Pocket sizes from 2cc to 100cc are available. Vacuum compatibility selections from 10-7 torr to 10-9 torr offer customers a one stop shop for all your multi-pocket source needs. Utilizing 270⁰ beam deflection, the Telemark sources are state-of-the-art in E-beam technology. Source options include traditional O-ring style or magnetic fluid feedthrough rotation. Installation kits, source shutters and pocket indexers can be supplied. Please contact Telemark with your ebeam source requirements for model and configuration assistance.
- ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
- 270° beam deflection (Hidden Filament)
- Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
- Rugged, reliable construction
- Designed for ease of use and maintainability
- Permanent magnet for primary beam positioning to provide improved control of evaporation process
- Durable emitter assembly with unique design for increased filament life and simple maintenance
- Plug-in emitter assembly for easy filament replacement
- Side or bottom crucible rotation drive
- Integral rotation feedthrough on models 246/266/276/296 eliminates water to vacuum seal
- Most components are maintained in stock
- A Source can normally be delivered in one-two weeks ARO
Improved Source Magnetics Reduce Beam Curl
A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.
| Model 264/266/274/276 | Model 294/296 | |
|---|---|---|
| E-Beam Deflection | 270° | 270° |
| Power Rating | 10 kW* | 12 kW* |
| High Voltage Range | -6 kV to -10 kV | -6 kV to -10 kV |
| Lateral Coil Resistance | 3.0 ohms | 3.0 ohms |
| Long. Coil Resistance | 9.6 ohms | 9.6 ohms |
| Water Requirements | 3 gpm(min.)@ 60°F | 5 gpm(min.)@ 60°F |
*Nominal value; actual power rating may vary, depending on customer’s process.
| Model 264/266 | Model 274/276 | Model 294/296 | |
|---|---|---|---|
| 4 x 7cc | -27 / -28 | -27 / -28 | |
| 4 x 15cc | -1 / -2 | -1 / -2 | |
| 4 x 25cc Shallow | -7 / -8 | -7 / -8 | |
| 4 x 30cc | -19 / -20 | -19 / -20 | -19 / -20 |
| 4 x 40cc w/web | -61 / -62 | ||
| 4 x 40cc w/o web | -45 / -46 | -44 / -45 | |
| 4 x 60cc | -81 / -82 | ||
| 2x15cc / 2x25 Shallow | -37 / -38 | ||
| 6 x 4cc | |||
| 6 x 7cc | -5 / -6 | -5 / -6 | |
| 6 x 15cc | -11 / -12 | -11 / -12 | -11 / -12 |
| 6 x 25cc | -17 / -18 | -17 / -18 | |
| 6 x 30cc | -75 / -76 | ||
| 6 x 40cc | -69 / -70 | ||
| 2x7cc / 4x15cc | -29 / -30 | ||
| 4x4cc / 2x15cc | -9 / -10 | ||
| 8 x 7cc | -13 / -14 | -13 / -14 | |
| 8 x 15cc | -1 / -2 | ||
| 8 x 25cc Shallow | -7 / -8 | ||
| Trough, 190cc | -15 / -16 | ||
| Trough, 275cc | -31 / -32 | ||
| Trough, 440cc | -79 / -80 | ||
| Side / Bottom | Side / Bottom | Side / Bottom |
Arc Free Upgrade
A source with the Arc Free is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.
Self-Sealing Cover Upgrade
An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.
Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.
The model 274 now ships with the new 274-0150-1 E-Beam Source Emitter with Improved Arc Resistance. The new design incorporates improved insulator shielding to resist arcing, allowing for longer filament lifetime, better process stability, and improved film quality.
