The “ultra” compact 508, 1.5cc ebeam source (e-gun) is UHV compatible and supplied on a 4.5” CFF flange for installation where effusion (Knudsen cell) K-cells are being used. The 508 source is perfect for refractory metals and high melting point materials in MBE environments.
- Mounted on 4.5” or 6” CFF for direct replacement of K-cells
- No beam sweep
- 1.5cc or 4cc pocket
- 5kV max.
- Shutter or Dual HV feedthru can be mounted on 6” CFF
|UHV Source 508|
|Power Rating||3 kW|
|High Voltage||- 5 kV|
|Water Requirements||2 gpm(min.)@ 60°F|