The “ultra” compact 508, 1.5cc ebeam source (e-gun) is UHV compatible and supplied on a 4.5” CFF flange for installation where effusion (Knudsen cell) K-cells are being used. The 508 source is perfect for refractory metals and high melting point materials in MBE environments.
- Mounted on 4.5” or 6” CFF for direct replacement of K-cells
- No beam sweep
- 1.5cc or 4cc pocket
- 5kV max.
- Shutter or Dual HV feedthru can be mounted on 6” CFF
| UHV Source 508 | |
|---|---|
| E-Beam Deflection | 270° |
| Power Rating | 3 kW |
| High Voltage | - 5 kV |
| Water Requirements | 2 gpm(min.)@ 60°F |