Model 508/528 UHV E-beam Source 
Model 508 UHV E-beam Source
Model 509 UHV E-beam Source
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The “ultra” compact 508, 1.5cc ebeam source (e-gun) is UHV compatible and is supplied by itself or installed on a 2.75” CF flange in a horizontal orientation. The 508 source is perfect for refractory metals and high melting point materials in MBE environments.
The model 509 is a 4cc UHV source with a 270° emitter. It is installed on a 4.5 or 6 inch CF flange in a vertical orientation for installations where effusion (Knudsen cell) K-cells are being used.
| UHV Source 508 | UHV Source 509 | |
|---|---|---|
| E-Beam Deflection | 180° | 270° |
| Power Rating | 3 kW | 4 kW |
| High Voltage | - 7 kV | - 7 kV |
| Water Requirements | 2 gpm(min.)@ 60°F | 2 gpm(min.)@ 60°F |
| Bake Out Temperature | ||
| UHV Source 508 | UHV Source 509 | |
|---|---|---|
| 1.5cc | 508-01 | |
| 1.5 on 2.75 CF Flange | 508-02 | |
| 4cc on 4.5 inch CF Flange | 509-05 | |
| 4cc on 4.5 inch CF Flange With HV feedthru | 509-06 | |
| 4cc on 6 inch CF Flange | 509-07 | |
| 4cc on 6 inch CF Flange With HV feedthru | 509-08 | |