For real-time thin film thickness and deposition rate control, quartz crystal (QCM) controllers are very reliable and time tested technology. Telemark supplies complete quartz crystal measuring systems to meet our customers’ demands. Telemark 800 series units come complete with oscillator, cables and hand-held remote.
Deposition Controller
861
State-of-the-art technology is used in the Telemark 861 controller. A large LCD color touchscreen and intuitive programming makes the 861 easy to use and integrate into your deposition system.
Designed as a “drop-in “replacement for the discontinued Maxtek 360 and Telemark 860 controllers, the 861 allows for our users to transfer existing processes and I/O setup directly. This is very important as our users because existing film designs have been carefully developed and tuned. Our 861 is the only unit on the market that allows such “direct transfer”.
The 861 controller is integrated to your ebeam controller for automatic ebeam depositions and cut points.
Sensor Heads
A high quality quartz crystal sensor head is critical to thickness and rate control. Attention to strict design rules is necessary. Telemark sensor head designs can be customized to meet your system needs. High temperature and dual crystal and shuttered configurations are available. Please contact Telemark for your sensor head needs.
Six Crystal Sensors
Telemark offers multiple crystal sensor heads for long duration coating runs where single or dual crystal sensor heads are not sufficient. Electrically driven, the Telemark six crystal sensor head offers accurate, fast indexing to fresh crystals.
This sensor is supplied with mounting hardware and feedthroughs.
