For real-time thin film thickness and deposition rate control, quartz crystal (QCM) controllers are very reliable and time tested technology. Telemark supplies complete quartz crystal measuring systems to meet our customers’ demands. Telemark 800 series units come complete with oscillator, cables and hand-held remote.

Model 861 Deposition Controller

Deposition Controller

861

State-of-the-art technology is used in the Telemark 861 controller. A large LCD color touchscreen and intuitive programming makes the 861 easy to use and integrate into your deposition system.

Designed as a “drop-in “replacement for the discontinued Maxtek 360 and Telemark 860 controllers, the 861 allows for our users to transfer existing processes and I/O setup directly. This is very important as our users because existing film designs have been carefully developed and tuned. Our 861 is the only unit on the market that allows such “direct transfer”.

The 861 controller is integrated to your ebeam controller for automatic ebeam depositions and cut points.

851 Thickness Monitor

Thickness Monitor

851

For simple thickness control without ebeam control integration the 851 Thickness Monitor contains all the great design features of the 861 Controller. It is a “price friendly” unit that is easy to install and operate.
High Quality 6 MHz and 5 MHz Replacement Crystals

Crystals

Telemark provides high quality replacement crystals for all units. 6 MHz and 5 MHz crystals in Gold or Alloy design are “in-stock” and available for fast delivery.
Quartz Crystal Sensor Heads

Sensor Heads

A high quality quartz crystal sensor head is critical to thickness and rate control. Attention to strict design rules is necessary. Telemark sensor head designs can be customized to meet your system needs. High temperature and dual crystal and shuttered configurations are available. Please contact Telemark for your sensor head needs.
6 Crystal Sensor Head

Six Crystal Sensors

Telemark offers multiple crystal sensor heads for long duration coating runs where single or dual crystal sensor heads are not sufficient. Electrically driven, the Telemark six crystal sensor head offers accurate, fast indexing to fresh crystals.

This sensor is supplied with mounting hardware and feedthroughs.

Sheet Resistance Monitor

Sheet Resistance Monitor

In-situ measurement of metal film electrical properties has long been a challenge for thin film applications. Telemark has developed an in-situ instrument for measuring sheet resistance during deposition.