For real-time thin film thickness and deposition rate control, quartz crystal (QCM) controllers are very reliable and time tested technology. Telemark supplies complete quartz crystal measuring systems to meet our customers’ demands. Telemark 800 series units come complete with oscillator, cables and hand-held remote.
Designed as a “drop-in “replacement for the discontinued Maxtek 360 and Telemark 860 controllers, the 861 allows for our users to transfer existing processes and I/O setup directly. This is very important as our users because existing film designs have been carefully developed and tuned. Our 861 is the only unit on the market that allows such “direct transfer”.
The 861 controller is integrated to your ebeam controller for automatic ebeam depositions and cut points.
Six Crystal Sensors
This sensor is supplied with mounting hardware and feedthroughs.