Telemark Model 263 E-Beam Source

For customers wishing to supply the crucible as part of their custom electron beam source (egun) mechanical assembly, the crucible-less sources offers a compact, cost-effective solution. End users can expect long filament life from these versatile sources, which can be supplied with optional arc-suppression.

  • 270° beam deflection (Hidden Filament)
  • Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
  • Rugged, reliable construction
  • Designed for ease of use and maintainability
  • Permanent magnet for primary beam positioning to provide improved control of evaporation process
  • Durable emitter assembly with unique design for increased filament life and simple maintenance
  • Plug-in emitter assembly for easy filament replacement
  • Most components are maintained in stock
  • A Source can normally be delivered in one-two weeks ARO
Model 263 Model 293
E-Beam Deflection270°270°
Power Rating10 kW*20 kW*
High Voltage Range-6 kV to -10 kV-6 kV to -10 kV
Lateral Coil Resistance3.0 ohms3.0 ohms
Long. Coil Resistance9.6 ohms9.6 ohms
Water Requirements3 gpm(min.)@ 60°F5 gpm(min.)@ 60°F

*Nominal value; actual power rating may vary, depending on customer’s process.

Model 263 Model 293
10 kW263-01
20 kW293-01
Arc Suppression Upgrade

Arc Suppression Upgrade

A source with the Arc-Suppression option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.