Telemark offers single pocket ebeam sources (e-gun) from 1.5cc to 160cc. Telemark single pocket source offerings include High Vacuum (10-7 torr) and Ultra High Vacuum (10-11 torr) models. UHV source are metal sealed construction and are bakeable to 250⁰C. Installation kits and source shutters can be supplied. Please contact Telemark for your ebeam source requirements for model and configuration assistance.
UHV Model 218
High Performance in a Small Package with Crucible Volumes to 15cc.
- Rated at 6kW* of power when operated at voltages from -6 to -10kV.
- Compact design for use in small research and development systems or wherever space is an important consideration.
- The model 218 UHV uses the same basic components as the standard model 211, with non-interchangeable crucibles and all metal sealing.
- Coils sealed in stainless steel cans are standard
UHV Model 259
Performance Proven in High-Power Production Applications
- Available in crucible volumes up to 100cc for long, uninterrupted evaporation.
- Rated at 14kW* when operated at -10kV.
- Capable of evaporating high rates of material such as aluminum. This makes the model ideal for processes that require a coating layer of one micron or more.
- The 259 is also well suited for operation at lower power levels where a large capacity for subliming materials might be required
| UHV Source 218 | UHV Source 259 | |
|---|---|---|
| E-Beam Deflection | 270° | 270° |
| Power Rating | 6 kW* | 10 kW* |
| High Voltage Range | -6 kV to -10 kV | -6 kV to -10 kV |
| Lateral Coil Resistance | 7.5 ohms | 3.0 ohms |
| Long. Coil Resistance | 9.5 ohms | 9.6 ohms |
| Water Requirements | 2 gpm(min.)@ 60-70°F (15-21°C) | 5 gpm(min.)@ 60-70°F (15-21°C) |
| Bake-out Temperature | 250°C | 250°C |
* Nominal value; actual power rating may vary, depending on customer’s process.
| UHV Source 218 | UHV Source 259 | |
|---|---|---|
| 1.5cc | 218-05 | |
| 4cc | 218-04 | |
| 7cc | 218-07 | 259-01 |
| 15cc | 218-15 | 259-02 |
| 25cc | 259-03 | |
| 30cc | 259-30 | |
| 40cc | 259-04 | |
| 100cc | 259-05 | |
| 160cc | 259-60 | |
Power Supplies
Shutters
Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.