Telemark cryochillers provide efficient closed-loop cryogenic refrigeration for water vapor pumping with cooling capacities from 1200W to 3600W. Telemark cryochillers support state of the art communications and full system integration. The digital control package operates at 24V and contains a battery backup. On-board RS-232, RS-485 and Ethernet communications will meet your remote operation needs and supports complete data-logging. Analog system control is also available. The back-lit on-cabinet LCD screen readouts allow rapid scrolling through all available monitor points. Likewise, all available monitor points can be sent remotely to a deposition controller for automated operation.
- Fast “Cool Down” for shorter cycle times
- More Efficient Water Vapor Pumping
- Small Footprint
- Fast Defrost
- Comprehensive Digital Control Package with Digital Communication Connectivity
Water Vapor Cryotraps:
- Decrease Pump down Times by 25% to 90%
- Attain Deeper Vacuum
- Improve Deposition Quality
- Eliminate Costly LN2 Usage For Fast Payback
|Model 1200||Model 1800||Model 2400||Model 2700||Model 3600|
|Maximum Load (Watts)||1,200||1,800||2,400||2,700||3,600|
|Theoretical Pumping Speed l/sec||100,000||150,000||200,000||245,000||300,000|
|Typical Pumping Speed l/sec||65,000||100,000||135,000||165,000||200,000|
|Ultimate Vacuum||2 x 10-8 (torr) mbar||2 x 10-8 (torr) mbar||2 x 10-8 (torr) mbar||2 x 10-8 (torr) mbar||2 x 10-8 (torr) mbar|
|Weight||425 lbs. (193 kg)||485 lbs. (243 kg)||485 lbs. (243 kg)||845 lb. (384 kg)||930 lb. (412 kg)|
|Power supply||380-440VAC 3 ph 50 Hz or 460VAC 3 ph 60 Hz or 200-230VAC 3 ph 50/60 Hz||380-440VAC 3 ph 50 Hz or 460VAC 3 ph 60 Hz or 200-230VAC 3 ph 50/60 Hz||380-440VAC 3 ph 50 Hz or 460VAC 3 ph 60 Hz or 200-230VAC 3 ph 50/60 Hz||380-440VAC 3 ph 50 Hz or 460VAC 3 ph 60 Hz or 200-230VAC 3 ph 50/60 Hz||380-440VAC 3 ph 50 Hz or 460VAC 3 ph 60 Hz or 200-230VAC 3 ph 50/60 Hz|
|Full load Current Draw @ 60Hz @200-230V||20 Amps||30 Amps||40 Amps||50 Amps||60 Amps|
|Full load Current Draw @ 60Hz @380-440V||10 Amps||15 Amps||20 Amps||25 Amps||30 Amps|
|Start Up Max Current Draw @ 60Hz @200-230V||30 Amps||60 Amps||60 Amps||60 Amps||85 Amps|
|Start Up Max Current Draw @ 60Hz @380-440V||15 Amps||30 Amps||30 Amps||30 Amps||45 Amps|
|Water requirement (Maximum)||5 lt/min @ 15°C, 10 lt/min @ 25°C, 20 lt/min @ 32°C||5 lt/min @ 15°C, 10 lt/min @ 25°C, 20 lt/min @ 32°C||6 lt/min @ 15°C, 12 lt/min @ 25°C, 30 lt/min @ 32°C||6 lt/min @ 15°C, 12 lt/min @ 25°C, 30 lt/min @ 32°C||8 lt/min @ 15°C, 16 lt/min @ 25°C, 30 lt/min @ 32°C|
|Water connections||3/4” NPT female||3/4” NPT female||3/4” NPT female||3/4” NPT female||3/4” NPT female|
|Refrigeration Connections||½” UltraSeal||½” UltraSeal||½” UltraSeal||½” UltraSeal||½” UltraSeal|
Selection of Appropriate Model
The model 1200 deals with heat loads up to 1200 watts and can typically trap up to 55,000 l/sec of water vapor, at a variety of vacuum depths. The 1800 deals with heat loads up to 1800 watts and typically traps up to 80,000 l/sec of water vapor at a variety of vacuum depths. The model 2400 handles up to 2400 watts and traps up to 125,000 l/sec, in a typical installation. The 2700 handles heat loads to 2700 watts, and typically traps up to165,00 l/sec of water vapor. The 3600 can manage a combined heat load of 3600 Watts and typically traps up to 200,000 l/sec.
When determining the optimum vapor trapping capability to significantly improve pump-down times, a preliminary goal should be to achieve at least four times the current water vapor trapping capability of your high vacuum pump.
Selection of the correct model cryotrap depends upon two primary factors: the amount of water vapor that needs to be trapped, and the total heat load the system needs to manage.
Total heat load is a combination of: 35 watts/square ft. of cryosurface, 8 Watts per linear ft. of insulated refrigerant line, “latent” heat loads which are extensive at shallow vacuum depth but can be ignored at 10-4 or below, and in-chamber heating of:
|Load in W/sq ft Black Body||Load in W/sq ft Shielded|
|50 deg. C||55||42|
|100 deg. C||100||75|
|150 deg. C||167||125|
|200 deg. C||262||197|
Working from Chamber drawings or specification, a custom designed cryocoil can be fabricated to perfectly fit your chamber and deliver optimal vapor trapping and heat removal performance
Cryocoils are made from copper tubing (stainless steel is also available) and constructed with a stainless steel feedthrough.
Many different coil shapes and configurations allow for optimum efficiency of your cryosurface.
The advanced digital control package operates at 24V, has battery back-up, and is fully CE compliant. Two 20 character 1/2” high backlit read-outs allow for easy reading and rapid scrolling through all available monitor points.
Convenient interface capability for RS-232, RS-485 or Ethernet (TCP/IP) allows for easily adapted system controls or external data-logging. This advanced control package is placed inside the main unit housing creating a smaller overall system footprint. The flexible capabilities of the controller remove the need for additional and costly system control options or specialized interface modules. A 37 pin remote connector is included for those wishing remote manual or analog system control.
(Available separately or as part of the cryocoil)
The dual pass feedthrough gives access to the chamber while maintaining the thermal isolation between the feed and return tubing. On the external side, couplings mate directly with the refrigerant line. On the chamber side, the feedthrough is braised to the cryosurface lines.
The “refrigerant line” contains both a feed line and a return line of copper tubing with stainless steel couplings to mate with the cryochiller and with the feedthrough. The refrigerant line is protected with foam type thermal insulation to minimize heat loss and protect against exposure to open air.
Dual Circuit Cryochillers
All five models are available in a dual circuit configuration, in which the systems provide independent control and cooling of two surfaces. Common configurations are two cryocoils or a cryocoil and a cryobaffle. Each circuit can cool or defrost independently with only a modest effect on the other circuit. For cryobaffles protected by a gate valve, the baffle can be constantly maintained at cryo-temperature while the in-chamber cryocoil is cycled for expected process time improvements. Each circuit is independently controlled and monitored.