Optical monitoring in large area deposition systems requires a new innovative method to reduce cost and yet increase measurement performance.
The Telemark Optical Monitor represents that breakthrough in distributed monitoring techniques that both reduces cost and improves performance. This instrument is built upon an open SQL data base containing all the run and setup data allowing the user to easily configure the system, run it and access the run data either from the operating computer or from any computer on the network in real time. The system is application driven with an easy setup tool for configuration of each spectrometer in the system.
Large systems take advantage of the distributed nature of the monitor, placing optical modules at various locations on the coating system up to 300 meters from the control computer thereby reducing the cost of fiber optic cables.