Telemark 851 Thickness Monitor

The NEW Telemark 851 Quartz Crystal (QCM) Thickness Monitor

Modern color LCD touch screen interface and capability for I/O upgrades and additional sensor heads makes this tool excellent for system upgrades and OEM users alike.

The unit contains an extensive material library and user definable materials.

Proprietary oscillator for 5MHZ or 6MHz operation and high resolution of < 0.01A

Unit come standard with 2 sensor inputs.

Brochure, Deposition Controller Systems 

Manual, Model 851 Deposition Controller 

Setup Guide, Model 851 Deposition Controller 

Thin Film Evaporation Guide 

Features

  • Half rack chassis for 19 inch rack mount or table top
  • High frequency internal reference oscillator provides <0.01A resolution for aluminum
  • Operates with 5 MHz or 6 MHz crystals
  • All new innovative crystal oscillator design for outstanding stability and noise immunity
  • Extensive materials library, also allowing for user definable materials
  • Color LCD touch screen for graphical and numerical display of primary real-time process data, providing an intuitive and user friendly operator interface
  • Touch screen capabilities: In-process parameter modification, I/O status and control, Real time graphical display of: Rate v/s time and Thickness v/s time
  • All system, film and setup files may be saved via a front panel USB port, as well as uploaded to instrument
  • Can accommodate up to 99 materials
  • 2 crystal sensor inputs included

Specs

Model 851
Sensor Crystal Frequency5 or 6 MHz
Resolution<0.02Hz (<0.01A for Al @ 6MHz)
Accuracy+/- 0.5% thickness
Thickness Display0.000 - 999.9 kÅ
Rate Display0.0 - 999 Å/s
Measurement Update10 per second
Inputs (optional)Optically isolated, active (12 to 24V DC), or passive (contact closure): Start/Zero, Stop, Source shutter, Sensor shutter
Outputs (optional)Relay contacts NO/NC @ max 1A, 24 DC or AC: Target Thickness Reached, Crystal Fail, Source shutter, Sensor shutter
DAC Outputs0-5VDC (thickness and rate)
Power Input90-264 VAC, 47-63 Hz