Telemark offers single pocket e-beam sources from 1.5cc to 160cc. Telemark single pocket source offerings include High Vacuum (10-7 torr) and Ultra High Vacuum (10-11 torr) models. UHV source are metal sealed construction and are bakeable to 250⁰C. Installation kits and source shutters can be supplied. Please contact Telemark for your ebeam source requirements for model and configuration assistance.
The “ultra” compact 508, 1.5cc source is UHV compatible and supplied on a 4.5” CFF flange for installation where effusion (K) cells are being used. The 508 source is perfect for refractory metals and high melting point materials in MBE environments.