- Mounted on 6” CF (optional CF flange configurations available)
- Pumps down to 10-11 torr
- No sweep coils
- Designed for ease of use and maintainability
- Long filament life with 270° beam deflection
Model 539 | |
---|---|
E-Beam Deflection | 270° |
Power Rating | 4 kW |
High Voltage Range | -5 kV to -7 kV |
Filament Power | Up to 575mA at -7kV |
Water Requirements | 2 gpm(min.)@ 60°F |
Bake Out Temperature | 250°C |
Crucible Volume | 4cc |
Model 528 | |
---|---|
3 pocket 1.8cc | 528-03 |
4 pocket 1.8cc | 528-04 |
5 pocket 1.8cc | 528-05 |
6 pocket 1.8cc | 528-06 |