Optical monitoring in large area deposition systems requires a new innovative method to reduce cost and yet increase measurement performance.
The Telemark Optical Monitor represents that breakthrough in distributed monitoring techniques that both reduces cost and improves performance. This instrument is built upon an open SQL data base containing all the run and setup data allowing the user to easily configure the system, run it and access the run data either from the operating computer or from any computer on the network in real time. The system is application driven with an easy setup tool for configuration of each spectrometer in the system.