product breakdown

Vacuum System Controller

The Telemark Vacuum System Controller upgrades older systems to a modern touchscreen PLC. It includes features such as full valve control, one-button operations for pump down, venting, and cryo pump regeneration, and compatibility with Telemark Deposition Controllers or other manufacturers. The software is customizable and supports automatic error logging, leak back tests, and process logging when paired with Telemark 861/862 Deposition Controller Windows Software.

The standard software can control various functions, including planetary rotation, dual crystal sensors, venting, sources, shutters, gas flow, pumps, and heaters. The hardware package includes a PLC on a DIN rail, a PC with Windows 11 Pro, a keyboard with a trackball and tray, and a 15-inch touchscreen mount.  Optional hardware includes gauges, temperature monitors, sweep and indexer systems, and additional accessories for enhanced functionality.

Vacuum System Controller
Telemark Vacuum System Controller that controls valves, pumps, heaters, planetary and more.
Telemark Vacuum System Controller controls one button cryogenic vacuum pump regeneration
Telemark Vacuum System Controller controls one button cryogenic vacuum pump regeneration
Telemark Vacuum System Controller one button chamber leak back test.
Telemark Vacuum System Controller one button chamber leak back test.
Works with the Telemark 861/862 Deposition Controller Windows Software for a Complete System Solution.
Works with the Telemark 861/862 Deposition Controller Windows Software for a Complete System Solution.

detailed information

  • Full Valve Control Solution
  • One Button Pump Down and Hand Off to Deposition Controller
  • One Button Vent
  • One Button Cryo Pump Regeneration
  • Works With Telemark Deposition Controllers or Other Manufactures
  • Software Customized to Your System
  • Automatic Logging of Errors And Leak Back Test
  • Process Logging When Using Telemark 861/862 Deposition Controller Windows Software
 
Standard Software Can Control
  • Planetary Rotation
  • Dual Crystal Sensor, 6 crystal Sensor
  • Vent
  • Soft Vent
  • Sources: E-beam source, Resistive Source, or Sputtering
  • Source Shutters
  • Gas Flow
  • Cryo, Diffusion, or Turbo Pump
  • Heater
Hardware included
  • PLC on a DIN rail
  • PC with Windows 11 Pro
  • Keyboard with trackball and tray
  • 15-Inch Touchscreen mount in 19-inch rack or on stand
 
Optional Hardware
  • MKS Granville Phillips Ion and Convectron Gauge set
  • Scientific Instruments SCM10 Temperature Monitor
  • Telemark Crucible Pocket Indexer
  • Telemark Programmable Sweep
  • Telemark 861/862 Deposition Controller
  • Telemark Link card for 861 to connect sweep and indexer.
  • Telemark 861/862 37-pin I/O cable

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