Crucible-less Sources
For customers wishing to supply the crucible as part of their custom electron beam source (egun) mechanical assembly, the crucible-less sources offers a compact, cost-effective solution. End users can expect long filament life from these versatile sources, which can be supplied with optional arc-suppression.
Brochure
Manuals
Drawings
- 270° beam deflection (Hidden Filament)
- Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
- Rugged, reliable construction
- Designed for ease of use and maintainability
- Permanent magnet for primary beam positioning to provide improved control of evaporation process
- Durable emitter assembly with unique design for increased filament life and simple maintenance
- Plug-in emitter assembly for easy filament replacement
- Most components are maintained in stock
- A Source can normally be delivered in one-two weeks ARO
| Model 263 | Model 293 | |
|---|---|---|
| E-Beam Deflection | 270° | 270° |
| Power Rating | 10 kW* | 20 kW* |
| High Voltage Range | -6 kV to -10 kV | -6 kV to -10 kV |
| Lateral Coil Resistance | 3.0 ohms | 3.0 ohms |
| Long. Coil Resistance | 9.6 ohms | 9.6 ohms |
| Water Requirements | 3 gpm(min.)@ 60°F | 5 gpm(min.)@ 60°F |
*Nominal value; actual power rating may vary, depending on customer’s process.
| Model 263 | Model 293 | |
|---|---|---|
| 10 kW | 263-01 | |
| 20 kW | 293-01 |
A source with the Arc Free (Suppression) option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.