product breakdown
Ion Sources
The Gridless End-Hall Ion Sources have been specially developed to provide a cost effective solution for ion assisted vacuum processes from small to large sized deposition systems. The sources provide an extremely reliable and maintenance-free up to 3kW source for many applications in PVD processes.
The compact design and rugged construction allows easy installation to both new and existing vacuum deposition systems.
detailed information
- Ion beam energies up to 300eV
- Ion beam currents to 15 amps
- Full-time use of high purity oxygen, argon or nitrogen.
- Highly efficient design greatly reduces gas load
- Water-cooled to reduce maintenance and radiation load
- Extremely low maintenance. The patented design utilizes a specially coated anode, which resists build-up of electrically insulating oxide coatings. No routinely replacement parts.
- Extremely stable operation in IAD processes
- Broad – beam divergence for large area coverage with uniform ion flux.
- Pulse-mode operation for ion-assistance of radiation-sensitive film materials such as many commonly used infrared and UV thin film materials eg MgF2 & LaF2. For further information please refer to separate information sheets.
- Remote Control and Monitoring – all control through an RS232 interface
| Model 750 | Model 1250 | Model 2000 | Model 3000 | |
|---|---|---|---|---|
| Source Diameter | 63mm diameter by 64mm long (2.48” x 2.53”) | 74mm diameter by 61mm long (2.91” x 2.4”) | 114mm diameter by 93mm long (4.49” x 3.66”) | 114mm diameter by 93mm long (4.49” x 3.66”) |
| Source Weight | 1.4 kgs (approx. 3 lbs) | 1.4 kgs (approx. 3 lbs) | 4 kg (approx. 8.5 lbs) | 4 kg (approx. 8.5 lbs) |
| Beam Power | Anode volts selectable to 225 volts; anode power 750W | Anode volts selectable to 225 volts; anode power 1250W | Anode volts selectable to 300 volts; anode power 2000W | Anode volts selectable to 300 volts; anode power 3000W |
| Anode Current | Maximum 5 amps under manual or automatic beam control | Maximum 5 amps under manual or automatic beam control | Maximum 7 amps under manual or automatic beam control | Maximum 10 amps under manual or automatic beam control |
| Beam Divergence | Wide beam divergence in excess of 80 degrees | Wide beam divergence in excess of 80 degrees | Wide beam divergence in excess of 80 degrees | Wide beam divergence in excess of 80 degrees |
| Gas Flow | Approximately 7sccm argon required to produce 2 amps (typical) | Approximately 7sccm argon required to produce 2 amps (typical) | Approximately 8sccm argon required to produce 2 amps (typical) | Approximately 8sccm argon required to produce 2 amps (typical) |
| Cooling Water | Minimum 2.3 liters/minute. Water flow is constantly monitored | Minimum 2.3 liters/minute. Water flow is constantly monitored | Minimum 2.5 liters/minute. Water flow is constantly monitored | Minimum 4.5 liters/minute. Water flow is constantly monitored |
| Power Unit Dimensions | 135mm x 480mm x 406mm | 135mm x 480mm x 406mm | 135mm x 480mm x 406mm | 180mm x 525mm x 435mm |
| Power Unit Weight | 28 kgs (60lbs) | 28 kgs (60lbs) | 30 kgs (66lbs) | 30 kgs (66lbs) |
Optional Features Available –
- Dual Filament. Electronic system detects filament failure and auto switches to second filament.
- Dual Gas This feature provides use of either pure gas delivery or a mixture of two gases in any ratio.
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