851 Quartz Crystal Thickness Monitor

Telemark 851 Thickness Monitor

The NEW Telemark 851 Quartz Crystal (QCM) Thickness Monitor

  • Modern color LCD touch screen interface and capability for I/O upgrades and additional sensor heads makes this tool excellent for system upgrades and OEM users alike.
  • The unit contains an extensive material library and user definable materials.
  • Proprietary oscillator for 5MHZ or 6MHz operation and high resolution of < 0.01A
  • Unit come standard with 2 sensor inputs.
  • Half rack chassis for 19 inch rack mount or table top
  • High frequency internal reference oscillator provides <0.01A resolution for aluminum
  • Operates with 5 MHz or 6 MHz crystals
  • All new innovative crystal oscillator design for outstanding stability and noise immunity
  • Extensive materials library, also allowing for user definable materials
  • Color LCD touch screen for graphical and numerical display of primary real-time process data, providing an intuitive and user friendly operator interface
  • Touch screen capabilities: In-process parameter modification, I/O status and control, Real time graphical display of: Rate v/s time and Thickness v/s time
  • All system, film and setup files may be saved via a front panel USB port, as well as uploaded to instrument
  • Can accommodate up to 99 materials
  • 2 crystal sensor inputs included
Model 851
Sensor Crystal Frequency5 or 6 MHz
Resolution<0.02Hz (<0.01A for Al @ 6MHz)
Accuracy+/- 0.5% thickness
Thickness Display0.000 - 999.9 kÅ
Rate Display0.0 - 999 Å/s
Measurement Update10 per second
Inputs (optional)Optically isolated, active (12 to 24V DC), or passive (contact closure): Start/Zero, Stop, Source shutter, Sensor shutter
Outputs (optional)Relay contacts NO/NC @ max 1A, 24 DC or AC: Target Thickness Reached, Crystal Fail, Source shutter, Sensor shutter
DAC Outputs0-5VDC (thickness and rate)
Power Input90-264 VAC, 47-63 Hz