Near UHV Multi-Pocket Sources
Telemark near UHV (10-9 torr) ebeam sources (e-gun) are supplied with magnetic fluid feedthrough rotation assemblies. Telemark sources utilize 270⁰ beam deflection. Installation kits, source shutters and pocket indexers can be supplied. Please contact Telemark for your near UHV source needs.
- ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
- 270° beam deflection (Hidden Filament)
- Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
- Rugged, reliable construction
- Designed for ease of use and maintainability
- Permanent magnet for primary beam positioning to provide improved control of evaporation process
- Durable emitter assembly with unique design for increased filament life and simple maintenance
- Plug-in emitter assembly for easy filament replacement
- Side or bottom crucible rotation drive
- Most components are maintained in stock
- A Source can normally be delivered in one-two weeks ARO
Improved Source Magnetics Reduce Beam Curl
A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.
| Model 249 | Model 269/279/299 | |
|---|---|---|
| E-Beam Deflection | 270° | 270° |
| Power Rating | 6 kW* | 10 kW* |
| High Voltage Range | -6 kV to -10 kV | -6 kV to -10 kV |
| Lateral Coil Resistance | 8.5 ohms | 3.0 ohms |
| Long. Coil Resistance | 7.5 ohms | 9.6 ohms |
| Water Requirements | 2 gpm(min.)@ 60°F | 3 gpm(min.)@ 60°F |
*Nominal value; actual power rating may vary, depending on customer’s process.
| Model 249 | Model 269 | Model 279 | Model 299 | |
|---|---|---|---|---|
| 4 x 4cc | 249-64 | |||
| 4 x 7cc | 249-28 | 269-28 | 279-28 | |
| 4 x 15cc | 269-02 | 279-02 | ||
| 4 x 25cc | 269-08 | 279-08 | ||
| 4 x 30cc | 269-20 | 279-20 | ||
| 4 x 40cc w/web | 279-62 | 299-45 | ||
| 4 x 40cc w/o web | 279-46 | |||
| 4x 60cc | 299-82 | |||
| 2x15cc / 2×25 | 279-38 | |||
| 6 x 4cc | 249-66 | |||
| 6 x 7cc | 249-06 | 269-06 | 279-06 | |
| 6 x 15cc | 269-12 | 279-12 | ||
| 6 x 25cc | 279-18 | 299-18 | ||
| 6x 30cc | 299-76 | |||
| 6x 40cc | 299-70 | |||
| 8 x 7cc | 269-14 | 279-14 | ||
| 8x 15cc | 299-02 | |||
| 8x 25cc | 299-08 | |||
| 12x 7cc | 299-06 |
Arc Suppression Upgrade
A source with the Arc-Suppression option is ideal for many applications, such as for optical coating and for ion plating without a pressure barrier. The reduction in arcing results in improved film quality, improved yields, and fewer arc-related maintenance issues.
Self-Sealing Cover Upgrade
An optional self-sealing cover plate is available for applications where cross contamination between materials is a concern.
Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.