R and D Multi-Pocket Sources
Telemark offers the largest selection of small R and D multi-pocket electron beam sources on the market. Pocket sizes of 2cc, 4cc and 7cc are available. Vacuum compatibility of 10-7 torr and utilizing 270⁰ beam deflection, the Telemark sources are state-of-the-art in small E-beam technology. Installation kits, source shutters and pocket indexers can be supplied. Please contact Telemark with your ebeam source requirements for model and configuration assistance.
- ROTATABLE HEARTH IS REMOVABLE FOR EASY CLEANING OR CHANGING OF CRUCIBLES
- 270° beam deflection (Hidden Filament)
- Proprietary, patented water cooling design means longer crucible life and more consistent evaporation of material
- Rugged, reliable construction
- Designed for ease of use and maintainability
- Permanent magnet for primary beam positioning to provide improved control of evaporation process
- Durable emitter assembly with unique design for increased filament life and simple maintenance
- Plug-in emitter assembly for easy filament replacement
- Side or bottom crucible rotation drive
- Integral rotation feedthrough on model 246 eliminates water to vacuum seal
- Most components are maintained in stock
- A Source can normally be delivered in one-two weeks ARO
Improved Source Magnetics Reduce Beam Curl
A range of new sources have been introduced which incorporate a significant change from the traditional magnetic field design, providing a much straighter beam path through the melt material, thus increasing the usable portion of the melt inventory and producing a more uniform and predictable evaporant cloud. These sources can be supplied with the optional Arc-Suppression or self-sealing cover plate.
| Model 221/224 | Model 244/246 | |
|---|---|---|
| E-Beam Deflection | 270° | 270° |
| Power Rating | 3 kW(221), 4 kW(224)* | 6 kW* |
| High Voltage Range | -5 kV to -7 kV | -6 kV to -10 kV |
| Lateral Coil Resistance | 8.5 ohms (224) | 8.5 ohms |
| Long. Coil Resistance | 7.5 ohms (224) | 7.5 ohms |
| Water Requirements | 2 gpm(min.)@ 60°F | 2 gpm(min.)@ 60°F |
*Nominal value; actual power rating may vary, depending on customer’s process.
| Model 221 | Model 224 | Model 244/246 | |
|---|---|---|---|
| 4 x 2cc | 221-05 / 221-06 | ||
| 4 x 4cc | 224-63 / 224-64 | -63 / -64 | |
| 4 x 7cc | -27 / -28 | ||
| 6 x 4cc | -65 / -66 | ||
| 6 x 7cc | -05 / -06 | ||
| Side / Bottom | Side / Bottom | Side / Bottom |
Electro-Pneumatic shutter controls are available with 1″, 32mm, or 2-3/4″ CFF feedthrough shutter assemblies.